File:Wafer flats convention v2.svg

Summary
Wafer flats convention, based on <a href="//commons.wikimedia.org/wiki/File:Wafer_flats_convention.PNG" title="File:Wafer flats convention.PNG">Image:Wafer flats convention.PNG</a>
Conventional meaning of flats in <a href="https://en.wikipedia.org/wiki/wafer_(semiconductor)" class="extiw" title="w:wafer (semiconductor)">semiconductor wafers</a>. Red denotes material that has been removed.
Wafer orientation is the orientation of the crystallographic plane in which the crystal grew. Wafer type indicated the type of doping.
Primary flat - indicates crystallographic planes of high symmetry (usually the {110} face).
Secondary flat - it's position relative to Primary flat or it's absence is indicating the doping type and the orientation of wafer.
- Absence - p {111}
- 90° - p {100}
- 180° - n {100}
- 45° - n {111}
Wafers under 200mm generally have flats indicating <a href="https://en.wikipedia.org/wiki/crystallography" class="extiw" title="w:crystallography">crystallographic</a> planes of high symmetry (usually the {110} face) and, in old-fashined wafers (those below about 100mm diameter), the wafer's orientation and doping type. Modern wafers use a notch to convey this information, in order to waste less material. Orientation is important for wafer <a href="https://en.wikipedia.org/wiki/cleavage" class="extiw" title="w:cleavage">cleavage</a>, and can affect other structural and electronic properties as well.
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File history
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 05:52, 6 January 2017 | ![]() | 150 × 150 (13 KB) | 127.0.0.1 (talk) | <p>Wafer flats convention, based on <a href="//commons.wikimedia.org/wiki/File:Wafer_flats_convention.PNG" title="File:Wafer flats convention.PNG">Image:Wafer flats convention.PNG</a> </p> <p>Conventional meaning of <i>flats</i> in <a href="https://en.wikipedia.org/wiki/wafer_(semiconductor)" class="extiw" title="w:wafer (semiconductor)">semiconductor wafers</a>. Red denotes material that has been removed. </p> <p>Wafer orientation is the orientation of the crystallographic plane in which the crystal grew. Wafer type indicated the type of doping. <br><b>Primary flat</b> - indicates crystallographic planes of high symmetry (usually the {110} face). <br><b>Secondary flat</b> - it's position relative to Primary flat or it's absence is indicating the doping type and the orientation of wafer. </p> <ul> <li> Absence - p {111}</li> <li> 90° - p {100}</li> <li> 180° - n {100}</li> <li> 45° - n {111}</li> </ul> <p>Wafers under 200mm generally have flats indicating <a href="https://en.wikipedia.org/wiki/crystallography" class="extiw" title="w:crystallography">crystallographic</a> planes of high symmetry (usually the {110} face) and, in old-fashined wafers (those below about 100mm diameter), the wafer's orientation and doping type. Modern wafers use a notch to convey this information, in order to waste less material. Orientation is important for wafer <a href="https://en.wikipedia.org/wiki/cleavage" class="extiw" title="w:cleavage">cleavage</a>, and can affect other structural and electronic properties as well. </p> |
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